Patent Assignment
Reel/Frame 035499/0660
Assignment of Assignor's Interest
Recorded: 2015-04-27
Pages: 2
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Substrate Aligning Apparatus, Substrate Bonding Apparatus, Substrate Aligning Method and Substrate Bonding Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.