Patent Assignment
Reel/Frame 035513/0576
Assignment of Assignor's Interest
Recorded: 2015-04-28
Pages: 6
Assignors
REITER, RAFAEL
Executed: 2015-03-19
PLATZGUMMER, ELMAR
Executed: 2015-03-18
SCHIESSL, KLAUS
Executed: 2015-03-12
Assignee
IMS NANOFABRICATION AG
SCHREYGASSE 3, VIENNA, 1020, AUSTRIA
Covered Property
(1)
Compensation of Defective Beamlets in a Charged-Particle Multi-Beam Exposure Tool
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.