Patent Assignment
Reel/Frame 035566/0720
Assignment of Assignor's Interest
Recorded: 2015-05-05
Pages: 9
Assignors
SASAKI, TAKAFUMI
Executed: 2015-03-25
MORIMITSU, KAZUHIRO
Executed: 2015-03-25
NISHITANI, EISUKE
Executed: 2015-03-30
YAMAMOTO, TETSUO
Executed: 2015-04-01
FUKUDA, MASANAO
Executed: 2015-03-30
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Reaction Tube, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.