Assignment of Assignor's Interest

Recorded: 2015-05-13 Pages: 3

Assignors

HISAMATSU, TORU

Executed: 2015-04-28

HONDA, MASANOBU

Executed: 2015-04-28

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Plasma Etching Method and Plasma Etching Apparatus

Patent: 9,524,876 →

Application: 14/710,695 →

Publication: US 2015/0332929