Patent Assignment
Reel/Frame 035657/0031
Assignment of Assignor's Interest
Recorded: 2015-05-18
Pages: 4
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Scatterometry Overlay Based on Reflection Peak Locations
Patent:
10,365,230 →
Application:
14/661,448 →