Patent Assignment
Reel/Frame 035663/0439
Assignment of Assignor's Interest
Recorded: 2015-05-18
Pages: 4
Assignees
TOHOKU UNIVERSITY
2-1-1 KATAHIRA, AOBA-KU, SENDAI, MIYAGI, 980-8577, JAPAN
MIE UNIVERSITY
1577 KURIMAMACHIYA-CHO, TSU, MIE, 514-8507, JAPAN
Covered Property
(1)
Substrate Having Annealed Aluminum Nitride Layer Formed Thereon and Method for Manufacturing the Same