Patent Assignment
Reel/Frame 035674/0612
Assignment of Assignor's Interest
Recorded: 2015-05-19
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Control Device for Substrate Processing Apparatus