Patent Assignment
Reel/Frame 035721/0541
Assignment of Assignor's Interest
Recorded: 2015-05-27
Pages: 9
Assignors
HARADA, KATSUYOSHI
Executed: 2014-02-19
HIROSE, YOSHIRO
Executed: 2014-02-19
KAMAKURA, TSUKASA
Executed: 2014-02-19
SANO, ATSUSHI
Executed: 2014-02-19
ORIHASHI, YUGO
Executed: 2014-02-19
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.