Patent Assignment
Reel/Frame 035776/0520
Assignment of Assignor's Interest
Recorded: 2015-06-03
Pages: 7
Assignors
JONCKHEERE, RIK
Executed: 2008-10-27
GOETHALS, ANNE-MARIE
Executed: 2008-10-27
LORUSSO, GIAN FRANCESCO
Executed: 2008-11-03
POLLENTIER, IVAN
Executed: 2008-10-27
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW (IMEC)
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Detection of Contamination in Euv Systems
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.