Patent Assignment
Reel/Frame 035815/0732
Alternative Official Name
Recorded: 2015-06-03
Pages: 22
Assignor
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW
Executed: 1984-03-18
Assignee
IMEC
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Detection of Contamination in Euv Systems
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.