Patent Assignment
Reel/Frame 035829/0015
Assignment of Assignor's Interest
Recorded: 2015-06-12
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Reactor System for Sublimation of Pre-Clean Byproducts and Method Thereof