Patent Assignment
Reel/Frame 035846/0505
Assignment of Assignor's Interest
Recorded: 2015-06-16
Pages: 4
Assignors
YOSHIDA, TAKASHI
Executed: 2015-03-09
MATSUMOTO, MASAHIRO
Executed: 2015-03-13
TANI, NORIAKI
Executed: 2015-03-13
IKEDA, SUSUMU
Executed: 2015-03-16
KUBO, MASASHI
Executed: 2015-03-16
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Film Formation Method and Film Formation Apparatus