Patent Assignment
Reel/Frame 036144/0340
Assignment of Assignor's Interest
Recorded: 2015-07-21
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Component for Use in Plasma Processing Apparatus, Plasma Processing Apparatus, and Method for Manufacturing the Component