Patent Assignment
Reel/Frame 036148/0583
Assignment of Assignor's Interest
Recorded: 2015-07-22
Pages: 7
Assignors
SHIMAMOTO, SATOSHI
Executed: 2015-07-21
HIROSE, YOSHIRO
Executed: 2015-07-17
YAMAMOTO, RYUJI
Executed: 2015-07-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device Including Forming a Film Containing a First Element, a Second Element and Carbon, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.