Patent Assignment
Reel/Frame 036154/0717
Assignment of Assignor's Interest
Recorded: 2015-07-22
Pages: 3
Assignors
SATO, YOSUKE
Executed: 2015-05-18
UI, AKIO
Executed: 2015-05-18
HAYASHI, HISATAKA
Executed: 2015-05-21
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-8001, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Application:
14/804,913 →
Publication:
US 2016/0027619