Patent Assignment
Reel/Frame 036160/0294
Assignment of Assignor's Interest
Recorded: 2015-07-23
Pages: 7
Assignors
LU, BIN
Executed: 2014-12-04
SUN, MIN
Executed: 2014-12-04
APOSTOL PALACIOS, TOMAS
Executed: 2014-12-05
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Semiconductor Structure and Recess Formation Etch Technique
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.