Patent Assignment
Reel/Frame 039266/0299
Confirmatory License
Recorded: 2016-07-06
Pages: 2
Assignor
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Executed: 2015-05-13
Assignee
U.S. DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE., SW, WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
Semiconductor Structure and Recess Formation Etch Technique
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.