Patent Assignment
Reel/Frame 036264/0492
Assignment of Assignor's Interest
Recorded: 2015-08-06
Pages: 6
Assignors
YAMADA, TAKU
Executed: 2015-07-10
TSURUTA, KAORU
Executed: 2015-07-27
TANEDA, YASUYUKI
Executed: 2015-07-10
OHTOSHI, KENJI
Executed: 2015-07-10
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHIN SUGITA CHO, ISOGO-KU, YOKOHAMA, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Apparatus and Charged Particle Beam Writing Method