Patent Assignment
Reel/Frame 036274/0821
Assignment of Assignor's Interest
Recorded: 2015-08-07
Pages: 4
Assignors
TAKAHASHI, MASAHIRO
Executed: 2013-10-11
HIROHASHI, TAKUYA
Executed: 2013-10-15
TSUBUKU, MASASHI
Executed: 2013-10-10
ISHIHARA, NORITAKA
Executed: 2013-10-17
OOTA, MASASHI
Executed: 2013-10-17
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Metal Oxide Film and Method for Forming Metal Oxide Film