Patent Assignment
Reel/Frame 036504/0598
Assignment of Assignor's Interest
Recorded: 2015-08-28
Pages: 47
Assignors
NICOLAIDES, LENA
Executed: 2015-07-01
TSAI, BEN-MING BENJAMIN
Executed: 2015-06-29
AJI, PRASHANT A.
Executed: 2015-08-27
GASVODA, MICHAEL
Executed: 2015-08-10
STOKOWSKI, STANLEY E.
Executed: 2015-06-22
ZHAO, GUOHENG
Executed: 2015-07-02
WEN, YOUXIAN
Executed: 2015-06-22
MAHADEVAN, MOHAN
Executed: 2015-08-07
HORN, PAUL D.
Executed: 2015-08-27
VOLLRATH, WOLFGANG
Executed: 2015-06-30
LEWIS, ISABELLA T.
Executed: 2015-07-21
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
In-Line Wafer Edge Inspection, Wafer Pre-Alignment, and Wafer Cleaning
Method for In-Line Semiconductor Wafer Edge Inspection, Simultaneous Wafer Pre-Alignment Measurement, and Wafer Cleaning
Application:
62/014,986 →