Patent Application
Provisional
App. No. 62/014,986
· Confirmation No. 9192
Method for In-Line Semiconductor Wafer Edge Inspection, Simultaneous Wafer Pre-Alignment Measurement, and Wafer Cleaning
Provisional Application Expired
Inventors
Lena Nicolaides
Castro Valley, CA
Ben Tsai
Saratoga, CA
Prashant Aji
San Jose, CA
Michael Gasvoda
Los Gatos, CA
Stanley Stokowski
Danville, CA
Guoheng Zhao
Palo Alto, CA
Youxian Wen
Fremont, CA
Mohan Mahadevan
Livermore, CA
Paul Horn
Milpitas, CA
Wolfgang Vollrath
Burbach, GERMANY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P4480
- Confirmation No.
- 9192
from
STOKOWSKI, STANLEY E.,
WEN, YOUXIAN,
TSAI, BEN-MING BENJAMIN,
VOLLRATH, WOLFGANG,
NICOLAIDES, LENA,
ZHAO, GUOHENG,
LEWIS, ISABELLA T.,
MAHADEVAN, MOHAN,
GASVODA, MICHAEL,
AJI, PRASHANT A.,
HORN, PAUL D.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-08-28
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 62/014,986
- Filed
- 2014-06-20
External Links