Patent Assignment
Reel/Frame 036619/0547
Assignment of Assignor's Interest
Recorded: 2015-09-22
Pages: 4
Assignors
SHIMOMURA, AKIHISA
Executed: 2015-09-07
OKUNO, NAOKI
Executed: 2015-09-09
ICHIJO, MITSUHIRO
Executed: 2015-09-07
SUZUKI, NORIYOSHI
Executed: 2015-09-07
TANAKA, TETSUHIRO
Executed: 2015-09-07
TEZUKA, SACHIAKI
Executed: 2015-09-07
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Evaluating Semiconductor Film and Method for Manufacturing Semiconductor Device