Assignment of Assignor's Interest

Recorded: 2015-09-29 Pages: 3

Assignor

IIDA, TSUKASA

Executed: 2015-09-24

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Recording Medium and Method of Manufacturing Semiconductor Device

Patent: 9,595,460 →

Application: 14/781,074 →

Publication: US 2016/0307783

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.