Patent Assignment
Reel/Frame 036706/0586
Assignment of Assignor's Interest
Recorded: 2015-10-01
Pages: 3
Assignors
YAMANAKA, TSUKASA
Executed: 2015-08-25
KAWAMOTO, TAKASHI
Executed: 2015-08-26
IGUCHI, NAOYA
Executed: 2015-08-26
Assignee
FUJIFILM CORPORATION
26-30, NISHIAZABU 2-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Manufacturing Organic Processing Fluid for Patterning of Chemical Amplification Type Resist Film, Organic Processing Fluid for Patterning of Chemical Amplification Type Resist Film, Pattern Forming Method, Method for Manufacturing Electronic Device, Andelectronic Device