Patent Assignment
Reel/Frame 036731/0266
Assignment of Assignor's Interest
Recorded: 2015-10-05
Pages: 6
Assignors
LAI, CHIUKIN STEVEN
Executed: 2015-09-02
KANARIK, KEREN JACOBS
Executed: 2015-09-03
TAN, SAMANTHA
Executed: 2015-09-02
CHANDRASHEKAR, ANAND
Executed: 2015-09-02
SU, TEH-TIEN
Executed: 2015-09-17
YANG, WENBING
Executed: 2015-09-02
DANEK, MICHAL
Executed: 2015-09-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching of Tungsten for Enhanced Tungsten Deposition Fill
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.