Assignment of Assignor's Interest

Recorded: 2015-10-16 Pages: 3

Assignor

WOOD, MICHAEL

Executed: 2015-10-14

Assignee

LAM RESEARCH CORPORATION

4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538

Covered Property (1)

Atomic Layer Etching of Tungsten for Enhanced Tungsten Deposition Fill

Patent: 9,972,504 →

Application: 14/830,683 →

Publication: US 2017/0040214

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.