Assignment of Assignor's Interest

Recorded: 2015-10-07 Pages: 3

Assignors

HARADA, KATSUYOSHI

Executed: 2015-09-24

HIROSE, YOSHIRO

Executed: 2015-09-21

SANO, ATSUSHI

Executed: 2015-09-24

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium

Patent: 9,460,914 →

Application: 14/856,244 →

Publication: US 2016/0079056

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.