Patent Assignment
Reel/Frame 036876/0165
Assignment of Assignor's Interest
Recorded: 2015-10-13
Pages: 3
Assignors
YAMADA, AKIO
Executed: 2015-09-07
OKAWA, TATSURO
Executed: 2015-09-07
SEYAMA, MASAHIRO
Executed: 2015-09-07
KUROKAWA, MASAKI
Executed: 2015-09-08
Assignee
ADVANTEST CORPORATION
32-1, ASAHI-CHO 1-CHOME, NERIMA-KU, TOKYO, 179-0071, JAPAN
Covered Property
(1)
Charged Particle Beam Exposure Apparatus Suitable for Drawing on Line Patterns, and Exposure Method Using the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.