Patent Assignment
Reel/Frame 036941/0262
Assignment of Assignor's Interest
Recorded: 2015-11-02
Pages: 5
Assignee
IMS NANOFABRICATION AG
SCHREYGASSE 3, VIENNA, 1020, AUSTRIA
Covered Property
(1)
Compensation of Dose Inhomogeneity Using Overlapping Exposure Spots
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.