Patent Assignment
Reel/Frame 036968/0619
Assignment of Assignor's Interest
Recorded: 2015-11-05
Pages: 6
Assignors
MIYAZAKI, KUNIHIRO
Executed: 2015-09-29
MINAMI, KENJI
Executed: 2015-09-29
NAGASHIMA, YUJI
Executed: 2015-09-01
HAYASHI, KONOSUKE
Executed: 2015-09-01
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1, KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.