Patent Assignment
Reel/Frame 036997/0750
Assignment of Assignor's Interest
Recorded: 2015-11-10
Pages: 3
Assignor
PERLITZ, SASCHA
Executed: 2013-07-29
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Characterizing a Structure on a Mask and Device for Carrying Out Said Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.