Patent Assignment
Reel/Frame 037146/0384
Merger
Recorded: 2015-11-19
Pages: 5
Assignor
CARL ZEISS SMS GMBH
Executed: 2015-04-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Characterizing a Structure on a Mask and Device for Carrying Out Said Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.