Patent Assignment
Reel/Frame 037378/0553
Assignment of Assignor's Interest
Recorded: 2015-12-29
Pages: 3
Assignors
ARASE, TAKAO
Executed: 2015-12-14
MORI, MASAHITO
Executed: 2015-12-14
YOKOGAWA, KENETSU
Executed: 2015-12-14
TAKEGAWA, YUUSUKE
Executed: 2015-12-21
ICHINO, TAKAMASA
Executed: 2015-12-14
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.