Patent Assignment
Reel/Frame 037628/0680
Assignment of Assignor's Interest
Recorded: 2016-01-31
Pages: 2
Assignors
OKITA, SHOGO
Executed: 2015-12-11
HARIKAI, ATSUSHI
Executed: 2015-12-11
MATSUBARA, NORIYUKI
Executed: 2015-12-11
Assignee
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
1-61, SHIROMI 2-CHOME, CHUO-KU, OSAKA-SHI, OSAKA, 540-6207, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method