Patent Assignment
Reel/Frame 037649/0734
Assignment of Assignor's Interest
Recorded: 2016-02-02
Pages: 4
Assignors
HUNG, YING-CHIEH
Executed: 2016-01-27
YU, MING-HUA
Executed: 2016-01-27
LIN, YI-HUNG
Executed: 2016-01-27
CHANG, JET-RUNG
Executed: 2016-01-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Metrology System and Measurement Method Using the Same