Patent Assignment
Reel/Frame 037704/0556
Assignment of Assignor's Interest
Recorded: 2016-02-11
Pages: 8
Assignors
NISHISAKA, TOSHIHIRO
Executed: 2015-06-26
KATO, YOSHIAKI
Executed: 2015-06-29
IWAMOTO, FUMIO
Executed: 2015-06-26
Assignee
GIGAPHOTON INC.
400 YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-8558, JAPAN
Covered Property
(1)
Target Supply Apparatus and Euv Light Generating Apparatus