Patent Assignment
Reel/Frame 037890/0671
Assignment of Assignor's Interest
Recorded: 2016-03-04
Pages: 2
Assignors
FUKUCHI, KOUSUKE
Executed: 2015-12-28
NAKAMOTO, SHIGERU
Executed: 2015-12-28
USUI, TATEHITO
Executed: 2016-01-05
INOUE, SATOMI
Executed: 2015-12-28
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU,, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.