Patent Assignment
Reel/Frame 038035/0035
Assignment of Assignor's Interest
Recorded: 2016-03-18
Pages: 8
Assignors
NODA, TAKAAKI
Executed: 2016-02-26
KONNO, KOTARO
Executed: 2016-02-26
NOHARA, SHINGO
Executed: 2016-03-03
HANASHIMA, TAKEO
Executed: 2016-03-03
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.