Patent Assignment
Reel/Frame 038036/0515
Assignment of Assignor's Interest
Recorded: 2016-03-18
Pages: 2
Assignors
SAKIYAMA, YUKINORI
Executed: 2016-03-01
AUGUSTYNIAK, EDWARD
Executed: 2016-03-15
KEIL, DOUGLAS
Executed: 2016-03-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Controlling Plasma Instability in Semiconductor Fabrication