Patent Assignment
Reel/Frame 038083/0337
Assignment of Assignor's Interest
Recorded: 2016-03-23
Pages: 3
Assignors
KATO, TOMOHIDE
Executed: 2011-10-28
NODA, TAKAAKI
Executed: 2011-10-28
MIZUNO, NORIKAZU
Executed: 2011-10-28
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOYKO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.