Patent Assignment
Reel/Frame 038230/0150
Assignment of Assignor's Interest
Recorded: 2016-04-08
Pages: 3
Assignor
DEVILLIERS, ANTON J.
Executed: 2016-04-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Method for Planarizing a Substrate