Patent Assignment
Reel/Frame 038335/0663
Assignment of Assignor's Interest
Recorded: 2016-04-20
Pages: 5
Assignors
WU, CHENG-TA
Executed: 2016-03-11
JANGJIAN, SHIU-KO
Executed: 2016-03-11
CHEN, CHENG-WEI
Executed: 2016-03-11
WANG, TING-CHUN
Executed: 2016-03-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8F, NO. 17, XINXING ST., DANSHUI DIST., TAIPEI CITY, 251, TAIWAN
Covered Property
(1)
Flat Sti Surface for Gate Oxide Uniformity in Fin Fet Devices