Patent Assignment
Reel/Frame 038342/0942
Assignment of Assignor's Interest
Recorded: 2016-04-21
Pages: 3
Assignors
LIU, ZUOGUANG
Executed: 2016-04-20
MIAO, XIN
Executed: 2016-04-20
ZHANG, CHEN
Executed: 2016-04-20
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
S/D Contact Resistance Measurement on Finfets