Patent Assignment
Reel/Frame 038418/0479
Assignment of Assignor's Interest
Recorded: 2016-04-29
Pages: 3
Assignor
SANO, ATSUSHI
Executed: 2014-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium Thereof and Semiconductor Manufacturing Method by Employing Thereof
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.