Patent Assignment
Reel/Frame 038456/0813
Assignment of Assignor's Interest
Recorded: 2016-05-04
Pages: 6
Assignors
LOUBET, NICOLAS J.
Executed: 2016-05-03
MEHTA, SANJAY C.
Executed: 2016-05-03
NARAYANAN, VIJAY
Executed: 2016-05-04
SANKARAPANDIAN, MUTHUMANICKAM
Executed: 2016-05-03
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Protection of High-K Dielectric During Reliability Anneal on Nanosheet Structures