Patent Assignment
Reel/Frame 038534/0308
Assignment of Assignor's Interest
Recorded: 2016-05-10
Pages: 3
Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
90 SCHLEISSHEIMER STR., GARCHING, 85748, GERMANY
Covered Property
(1)
Apparatus, System, and Method for Handling Aligned Wafer Pairs