Assignment of Assignor's Interest

Recorded: 2016-06-01 Pages: 7

Assignors

NITTA, TAKAFUMI

Executed: 2016-05-24

SHIMAMOTO, SATOSHI

Executed: 2016-05-24

HIROSE, YOSHIRO

Executed: 2016-05-25

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

Patent: 9,773,661 →

Application: 15/170,352 →

Publication: US 2016/0358767

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.