Patent Assignment
Reel/Frame 038897/0179
Assignment of Assignor's Interest
Recorded: 2016-06-13
Pages: 2
Assignor
EMOTO, TETSUYA
Executed: 2016-05-27
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method