Patent Assignment
Reel/Frame 038921/0112
Assignment of Assignor's Interest
Recorded: 2016-06-15
Pages: 4
Assignors
KOBAYASHI, KENJI
Executed: 2016-05-13
SAWASHIMA, JUN
Executed: 2016-05-13
NAKASHIMA, AKIHIRO
Executed: 2016-05-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method