Patent Assignment
Reel/Frame 038962/0073
Assignment of Assignor's Interest
Recorded: 2016-06-20
Pages: 4
Assignors
CHANG, SHU-HAO
Executed: 2016-04-12
KAU, KUO-CHANG
Executed: 2016-04-12
HUANG, KEVIN
Executed: 2016-04-12
CHEN, JENG-HORNG
Executed: 2016-04-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Lithography Patterning with a Gas Phase Resist